Tungsten Nitrido Complexes as Precursors for Low Temperature Chemical Vapor Deposition of WNxCy Films as Diffusion Barriers for Cu Metallization

K. Randall McClain, Christopher O’Donohue, Arijit Koley, Richard O. Bonsu, Khalil A. Abboud, Joseph C. Revelli, Timothy J. Anderson, and Lisa McElwee-White

J. Am. Chem. Soc. 2014, 136, 1650-1662

DOI: 10.1021/ja4117582



Synthesis of WN(NMe2)3 as a Precursor for the Deposition of WNx Nanospheres

K. Randall McClain, Christopher O’Donohue, Zhiwei Shi, Amy V. Walker, Khalil A. Abboud, Tim Anderson and Lisa McElwee-White

Eur. J. Inorg. Chem., 2012, 4579–4584.

DOI: 10.1002/ejic.201200254



Synthesis and Characterization of Diorganohydrazido(2–) Tungsten Complexes

Jürgen Koller, Hiral M. Ajmera, Khalil A. Abboud, Timothy J. Anderson and Lisa McElwee-White

Inorg. Chem., 2008, 47, 4457-446.

DOI: 10.1021/ic701151m